Robotic micro-assembly

The context of these works if the need of manufacturing always smaller, smarter and more complex systems. The key locks are the capability to integrate together several technologies and to acceed to the 3rd dimension. Among several approaches, robotic micro-assembly appears as a promising one especially to achieve 3D integration at the chip level. We notably studied how to achieve complex, automated and highly accurate robotic micro-assembling of various components but more especially Micro-Optical Benches. These works are presented below and [1] provides a synthesis including automated assembly in open loop, in closed loop based on hybrid force-position control and in closed loop based on CAD model tracking.


Reconfigurable Free-Space Micro-Optical-Bench

 

These works have been done together with the team of Christophe Gorecki (MN2S department). The concept of Reconfigurable Free-Space Micro-Optical-Bench relies on a library of basic optical components (named holders) that are assembled using a robotic micro-assembly plateform onto a substrate. The use of gripper based on active materials enables to provide reversible but also extremely accurate assemblies. Thus it is possible to easily reconfigure an assembled micro-optical-Bench, to insert new fonctionalities or to assemble a new product based on elementary optical fonctionalities.  The Figure presented below provides some examples, the way to assemble components onto the substrate and some demonstrators [2], [3] and [4]. We are currently working on the integration of actuators inside of the holders, we are more particularly working on PMN-PT based materials that induce large displacements in a very small volume.

Micro-assembly platforms

Several micro-assembly platforms have been proposed to investigate different ways to assemble micro-scale components. Micro-assembly platforms may be quite complex because they often combine highly powerfull sensors (microscopes, laser sensors...) and a kinematic including many redundancies to combine coarse-fine positioning and to suceed in achieving complex motions.` `

 

Figure : Robotic micro-assembly platform comprising a piezoelectric microgripper (c), a laser sensor  (b), 16 micro and nano-positionning axis (a) and (e).

 

Automated micro-assembly using visual servoing

The characterization of the motion of robots along several degrees of freedom at the nanoscale is a very challenging task. It requires multi-DoF measurement with very high range-to-resolution ratio, large bandwidth and very small sensors to enable their integration. This lack of sensor strongly limits the understanding of micro-nano systems and robots behavior. To tackle this lock we are working on pattern-based visual measurement and apply them on several typical cases of study.

 

 

Automated micro-assembly based on hybrid force-position control

The characterization of the motion of robots along several degrees of freedom at the nanoscale is a very challenging task. It requires multi-DoF measurement with very high range-to-resolution ratio, large bandwidth and very small sensors to enable their integration. This lack of sensor strongly limits the understanding of micro-nano systems and robots behavior. To tackle this lock we are working on pattern-based visual measurement and apply them on several typical cases of study.

 

 

Micro-assembly characterization

The characterization of the motion of robots along several degrees of freedom at the nanoscale is a very challenging task. It requires multi-DoF measurement with very high range-to-resolution ratio, large bandwidth and very small sensors to enable their integration. This lack of sensor strongly limits the understanding of micro-nano systems and robots behavior. To tackle this lock we are working on pattern-based visual measurement and apply them on several typical cases of study.

 

Selected publications

[1]  Robotic Microassembly and micromanipulation at FEMTO-ST, 

J. Agnus, N. Chaillet, C. Clévy, S. Dembélé, M. Gauthier, Y. Haddab, G. Laurent, P. Lutz, N. Piat, K. Rabenorosoa, M. Rakotondrabe and B. TamadazteJournal of Molecular Biology Research (JMBR), 8(2), pp 91-106, 2013.


[2] Towards Micro-Assembly of Hybrid MOEMS Components on Reconfigurable Silicon Free-Space Micro-Optical Bench,

S. Bargiel, K. Rabenorosoa, C. Clévy, C. Gorecki and P. Lutz, Journal of Micromechanics and Microengineering (JMM), 20(4), 2010.


 

[3] Assembly of 3D Reconfigurable Hybrid MOEMS through Microrobotic Approach,

K. Rabenorosoa, S. Bargiel, C. Clévy, P Lutz and C Gorecki,  Lecture Notes in Automation, Frontiers of Assembly and Manufacturing, pp. 99-112, 2010.


[4] Technology Platform for Hybrid integration of MOEMS on Reconfigurable silicon Micro-Optical Table,

S.Bargiel, K. Rabenorosoa, J. P. Mascaro, C. Clévy, C. Gorecki and P. Lutz,  Eurosensors, Linz, Austria, September, 2010.