Fabrication of Micro-House by µRobotex Station

A 20*10*15 µm micro-house made by bending and assembly of pieces cutted into a thin membrane of thickness 1µm in the µRobotex station of the FEMTO-ST laboratory, for Micronora 2016. The joining of the elements and the chimney were obtained by naphthalene deposition. The micro-house is attached to an optical fiber of 120 μm diameter.

Rauch, J. Y., Lehmann, O., Rougeot, P., Abadie, J., Agnus, J., & Suarez, M. A. (2018). Smallest microhouse in the world, assembled on the facet of an optical fiber by origami and welded in the μRobotex nanofactory. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 36(4), 041601.

Accurate 3D-Positioning in a SEM through Robot Calibration

This video illustrates a paper presented in the conference MARSS 2018. This paper develops a procedure allowing to perform object rotation while keeping it at the same 3D-position in open loop. Such performance is achieved by a method of robot calibration based on visual servoing and autofocus inside SEM. This kind of properties is required for manipulation and 3D reconstruction inside SEM.

4-DoF Spherical Parallel Wrist with Embedded Grasping Capability for Minimally Invasive Surgery

This paper presents preliminary results of a new robotic wrist for minimally invasive surgery. This wrist is a high-dexterity miniature robot, able to provide simultaneously the grasping/cutting (1-DoF) and rotations capabilities with 3-DoF. The grasping function is insured by the folding of the top platform of a parallel structure. The grasping capability of the wrist is part of the mechanical structure itself and can be fully controlled by external actuators.

Haouas, W., Dahmouche, R., Le Fort-Piat, N., & Laurent, G. J.. 4-DoF spherical parallel wrist with embedded grasping capability for minimally invasive surgery. In IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS), 2016 (pp. 2363-2368).

3D-Printed Vision-Based Micro-Force Sensor Dedicated to In Situ SEM Measurements

This paper presents a 3D-printed vision-based micro-force sensor intended to be used inside the chamber of a Scanning Electron Microscope (SEM). The combination of 3D printed elastic structures with a highly effective vision based measurement method allows to design integrated sensors at the cutting edge of the state of the art. Images of periodical patterns are used to measure the differential displacement between the two parts of the compliant structure. By the knowledge of its stiffness, the force applied on it is measured. The stiffness of the elastic structure has been measured to be 15.3 N.m-1, leading to a force range of 25 μN.

Guelpa, V., Prax, J. S., Vitry, Y., Lehmann, O., Dehaeck, S., Sandoz, P., Clévy, C., Le Fort-Piat, N., Lambert, P. & Laurent, G. J. 3D-printed vision-based micro-force sensor dedicated to in situ SEM measurements. In IEEE International Conference on Advanced Intelligent Mechatronics (AIM), 2017  (pp. 424-429).

Dexterous Micromanipulation for Integrated Optics

High-accuracy, multi-Degrees-Of-Freedom positioning of a beam splitter thanks to the dexterous manipulation of a 4 Degrees-Of-Freedom microgripper. The beam splitter is part of a Michelson micro-interferometer providing a high accuracy position measurement feedback (active based principle).

K. Rabenorosoa, A. N. Das, R. Murthy, C. Clévy, D. Popa and P. Lutz, Precise motion control of a piezoelectric microgripper for microspectrometer assembly. In ASME IDETC-CIE International Design Engineering Technical Conferences & Computers and Information in Engineering Conference, 2009.