Microsystems design and Microfabrication


The design of microsystems is characterized by interdisciplinary approaches and close interaction between different domains of physics at multiple scales. Understanding of the interplay between the material properties, the fabrication process and the geometry is essential for conceiving micro-devices with new functionalities.

Our group has developed a good experience in analytic lumped-analysis modeling of devices in multiple domains (acoustics, microfluidics, mechanics and electronics/control) combined with numerical verification using MATLAB or FEM tools like COMSOL and ANSYS. Additionally, based on a cumulated experience of more than 50 years in microfabrication, we are able to propose realistic fabrication process in the FEMTO-ST cleanroom facilities for reaching desired device functions.

The clean room facilities cover almost 800m2, incorporating an area for lithography, deposition, etching, plus the packaging and characterization. The facilities are used for projects in numerous sectors from Micro & Nanotechnology to Biotechnology, Coatings, Medical Device, photonics, optical MEMS, BIOMEMS Device…
We welcome the opportunity for providing a turnkey solution or a collaborating framework for the success of your projects.

(see for more information on our cleanroom facilities).


 From the design to the complete setup


 GaAs wet etching with H3Po4


Bio-engineering and Bioanalytics


The BioMicroDevices group includes biochemists and biophysicists which give it a particular positioning in the field of bioanalytics. The merging with physicists and technologists offers new prospects to overpass major drawbacks in the fields of diagnosis and biosensing.
Among the particular skills claimed by the group, we could mention:

In the fields of biochips, biosensors and materials:

  • Production of biochips based on advanced functional materials,
  • Micro/nanostructuration of chip surfaces,
  • Chemical and biochemical surface functionalizations
  • Production of soluble and membrane recombinant proteins (E. coli; L. lactis)
  • Development of biochips (protein, DNA, lipidic models, cell-chips)

In the field of Biomolecular Interaction Analysis:

  • Nanocharacterization of surfaces and biointerfaces by atomic force microscopy coupled with fluorescence
  • Real-time and label-free analysis of biomolecular interactions by means of SPR and SPRi approaches
  • Biodetection of large panel of biological targets (molecules, circulating cells or microparticles) in complex biological fluids (blood, plasma etc.).
  • Qualification and quantification by SPR and/or AFM

Our level of expertise allow us to participate to numerous research programs with academic and industrial collaborators.
Moreover, activities in biochip developments and analytical services are provided since 2014 by FEMTO-Engineering, a new center for technological development:


Gold BiochipsSPRi
Biochip functionnalizationSpotterAFM


Optics and photonics for medical instrumentation.

Our knowledge and know-how are clearly oriented towards the clinical applications of miniaturized biomedical optics. The goal is not only to design optical instrumentation to meet clinical needs identified at the international level, but also, and above all, to bring this instrumentation closer to patients. To do so, we need to rethink systems and take into account the constraints related to the use of biological samples, most often directly after sample removal.
To use in vitro diagnostic systems at the bedside, for example, the optofluidic environment must thus be designed to make measurements reliable, reproducible and as independent as possible from variability in the biological samples used. Also, constraints in the use of devices by care givers must be taken into account, while respecting standard medical practices.

In order to address these challenges, our activities are organized along the two following themes:

  • Prior health research: microscopy, image processing, microsystems, optical and spectroscopic study of cancerous tissues, fluorescence amplification, optical coherence tomography, on-chip labs for the detection of odors and a microsystem for allergen quantification.
  • Translational Research: automated systems for the detection of infections, an integrated system for measuring systolic pressure, optical detection for donor and recipient blood compatibility.

We therefore have two objectives: 1) to develop original solutions using optics to describe tissues and cells, and also to develop methods for conducting new types of health studies; and 2) to develop laboratory and instrumentation prototypes responding directly to a given medical problem.


  • Optical medical devices
  • Biosensors
  • Optical metrology
  • Microsystems
  • Translational research
  • Health engineering
  • Technology and instrumentation

 Optics and photonics for medical instrumentation.