Welcome to the PiezoMEMS group website


Scientific objectives

Developing lead-free piezoelectric systems of tomorrow for :

  • MEMS with ultra low power electronics
  • Microacoustic resonators for ultra-wide frequency for 5/6G
  • Ultrasonic sensors for harsh enviroments 
  • Micro and nano optical system

Research interests

Advanced micro and nanotechnologies

  • Thin film growth and epitaxy
  • Silicon-free MEMS processes
  • Lead-free processes

Transfert technologies

  • Hybrid LiNbO3 wafers (silicon, sapphire, stainless steel)
  • Graphene transfer


  • Substrate polishing technologies
  • Ultrasonic machining of composites (Quartz)
  • RIE Optical wave guide processes


  • Optimization of architectures for electromechanical coupling

Assemblage micro-miroirs                 MEMS


View of New York City

(KNbO3 growth on LNY36 substrate)

Know-how to be

Before being a research team, the members of the piezoMEMS lab. constitute a multicultural social group based on mutual aid, respect for others, solidarity and trust.
If research is the foundation of the piezoMEMS team, the cohesion of the group is its cement.

We defend and assert these values so that each woman and man, permanent staff, students, contractual staff, etc., find their place within the team and are recognized in the same way by the others. 

For us, being a team is not the sum of individualities but the sum of particularities which associated together form a group.


The specificity and the strong point of the theme studied by the team, unique at the national level, is that it masters the whole chain from design/modeling to characterization through realization.

The person in charge of the resource "Characterization and shaping of massive piezo materials" of the MIMENTO platform is also part of the team.

Please feel free to contact us!

We can host academic and engineering school trainees, with a choice of experimental and theoretical subjects.

Our PhD theses and post-doctoral positions are displayed on this website, in particular. This kind of position, however, can be prepared ahead of time, so please do not hesitate to get in touch with us even though no position is opened.



The piezoMEMS group is part of the Time-Frequency research department, a joint research unit between the Centre National de Recherche Scientifique  (CNRS), the université de Franche-Comté (UFC), the Ecole Nationale Supérieure de Mécanique et de Microtechniques (SUP-MICROTECH-ENSMM), and, the Université de Technologie de Belfort-Montbéliard (UTBM).