Capacitive MEMS Resonators

A Research on C-MARs (Capacitive Micro-Acoustical Resonators) started at T&F Department in 2009. This research focuses on the improvement of full silicon acoustic resonators through the concept of energy-trapping of elastic waves. This concept is closely related to the stop-band techniques of Micro-Acoustics and could be used in previous capacitive MEMS resonators exploiting structural vibrations. Thereby, new designs must be investigated.

Two kinds of C-MARs Capacitive Micro-Acoustical Resonators are currently studied:
C-BARs are Capacitive Bulk Acoustic Waves Resonators exploiting Thickness-Extensional modes,
C-PARs are Capacitive Plate Acoustic Waves Resonators exploiting Lamb waves.

A key point of the capacitive transduction of elastic waves components is the optimization of the compromise between k2 coupling coefficient and Q-factor. In this view, we develop new modeling tools and technology.

C-BARs realisations

C-PARs ongoing work



Acknowledgment. This research activity is currently supported by the project number- 15-ASTR-0011-01 from ANR (Agence Nationale de la Recherche).

[1] B. Dulmet, M. Ivan, and S. Ballandras. Electrostatic generation of bulk acoustic waves and electrical parameters of Si—MEMS resonators. IEEE TUFFC, 63(2):313–325, 2016.
[2] L. Arapan, M. Ivan, B. Dulmet, One-dimensional Modelling of Electrostatic Generation and Detection of Bulk Acoustic Waves in layered structures, arXiv:1612.06641
[3] Patent S2014300246 (A1), Volume Waves Resonator with excitation-detection of vibration, B. Dulmet, M. Ivan, S. Ballandras.