Component Characterization

Heterodyne probe measure vertical displacement at the surface of a device. This heterodyne probe measures the information of the phase and the amplitude for the high frequency devices. The phase information makes it possible to acquire a certain amount of essential information on the characteristics of RF-MEMS (Radio Frequency MicroElectroMechanical System) devices... to read more


All of the CoSyMA team's fabrications are dedicated to elastic wave components. The research and development carried out, are with the aim of pooling the processes and increasing the performance of the components. Research results are also applied to devices in other scientific fields such as optics or energy recovery... to read more

Material synthesis, treatments and Characterization

Thin film deposition tools