Component Characterization

Heterodyne probe

Heterodyne probe measure vertical displacement at the surface of a device. This heterodyne probe measures the information of the phase and the amplitude for the high frequency devices. The phase information makes it possible to acquire a certain amount of essential information on the characteristics of RF-MEMS (Radio Frequency MicroElectroMechanical System) devices.

Frequency range [100kHz:3.2GHz]

Spatial resolution 0.01µm

Vertical resolution 100pm


Radio-frequency probe station


Radio-frequency probe station is use to probe SAW/BAW devices realized.

Frequency range [100kHz:8.5GHz]

Pitch of pads (Ground-signal): 125µm, 250µm, 500µm and 1mm

Temperature range [25°C:200°C]