Heterodyne probe measure vertical displacement at the surface of a device. This heterodyne probe measures the information of the phase and the amplitude for the high frequency devices. The phase information makes it possible to acquire a certain amount of essential information on the characteristics of RF-MEMS (Radio Frequency MicroElectroMechanical System) devices.
Frequency range [100kHz:3.2GHz]
Spatial resolution 0.01µm
Vertical resolution 100pm
Radio-frequency probe station is use to probe SAW/BAW devices realized.
Frequency range [100kHz:8.5GHz]
Pitch of pads (Ground-signal): 125µm, 250µm, 500µm and 1mm
Temperature range [25°C:200°C]