Functional Materials with designed physical properties

Upper part of the DLI-CVD MC-100 @MIMENTO

Up-scaling of LiNbO3 Thin Film Growth by DLI-CVD


Fast and reproducible synthesis with up-scaling possibilities of high-quality textured and epitaxial alkaline niobate (LiNbO3 , LiTaO3, & KNbO3) thin films suitable for acoustical, optical and energy harvesting applications


  • 2 precursor lines (multi-metallic oxides) with storage at RT
  • Fully automatic and fully secured in case of failure (water, electricity, compressed air…
  • 100 mm substrates

Epitaxial films Z, X, Y, 128°-Y & 33°-Y oriented LiNbO3 films:

  • Single phase films
  • Tuning of Li nonstoichiometry in a controlled way
  • Films with nearly stoichiometric composition
  • Single in-plane orientation


XRD patterns and pole figures of X-, Y-, and Z-LiNbO3 films on sapphire substrates

LiNbO3 and LiTaO3 single crystals with controlled Li nonstoichiometry

Precision control of Li nonstoichiometry in LiNbO3 and LiTaO3 single crystals (stoichiometric and sub-congruent compositions, compositional gradients)