Upper part of the DLI-CVD MC-100 @MIMENTO
Up-scaling of LiNbO3 Thin Film Growth by DLI-CVD
Objectives
Fast and reproducible synthesis with up-scaling possibilities of high-quality textured and epitaxial alkaline niobate (LiNbO3 , LiTaO3, & KNbO3) thin films suitable for acoustical, optical and energy harvesting applications
Capability
- 2 precursor lines (multi-metallic oxides) with storage at RT
- Fully automatic and fully secured in case of failure (water, electricity, compressed air…
- 100 mm substrates
- DLI-ALD
Epitaxial films Z, X, Y, 128°-Y & 33°-Y oriented LiNbO3 films:
- Single phase films
- Tuning of Li nonstoichiometry in a controlled way
- Films with nearly stoichiometric composition
- Single in-plane orientation
XRD patterns and pole figures of X-, Y-, and Z-LiNbO3 films on sapphire substrates
LiNbO3 and LiTaO3 single crystals with controlled Li nonstoichiometry
Precision control of Li nonstoichiometry in LiNbO3 and LiTaO3 single crystals (stoichiometric and sub-congruent compositions, compositional gradients)